Nano-electro-mechanical systems (NEMS) are a class of devices assimilating electrical and mechanical functionality on the nanoscale. NEMS form the rational following miniaturization step from so called microelectromechanical systems, or MEMS devices. NEMS usually incorporate transistor-like nanoelectronics with mechanical actuators, pumps, or motors, and may thus form physical, biological, and chemical sensors. The title derives from typical device dimensions in the nanometer range, leading to low mass, high mechanical reverberation regularities, potentially great quantum mechanical possessions such as zero point motion, and a great surface-to-volume relation useful for surface-based sensing mechanisms. Uses embrace accelerometers, or detectors of chemical substances in the in-flight.